Michio Uneda

Publication Activity (10 Years)

Years Active: 2014-2022
Publications (10 Years): 3

Top Topics

Chemical Vapor Deposition

Selection Mechanism

Top Venues

Int. J. Autom. Technol.

Publications

Michio Uneda, Nodoka Yamada, Yoshihiro Tawara
Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores. Int. J. Autom. Technol. 16 (1) (2022)
Michio Uneda, Naoki Takahashi, Takashi Fujita, Yutaro Arai
Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC. Int. J. Autom. Technol. 15 (6) (2021)
Natsuko Omiya, Hideo Aida, Yutaka Kimura, Yuki Kawamata, Seong-Woo Kim, Michio Uneda
Patterned Sapphire Substrates for III-Nitride Epitaxial Growth. Int. J. Autom. Technol. 12 (2) (2018)
Michio Uneda, Keiichi Takano, Koji Koyama, Hideo Aida, Ken-Ichi Ishikawa
Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher. Int. J. Autom. Technol. 9 (5) (2015)
Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi
Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate. Int. J. Autom. Technol. 8 (1) (2014)