Yutaro Arai

Publication Activity (10 Years)

Years Active: 2021-2021
Publications (10 Years): 1

Top Topics

Evaluation Criteria

Top Venues

Int. J. Autom. Technol.

Publications

Michio Uneda, Naoki Takahashi, Takashi Fujita, Yutaro Arai
Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC. Int. J. Autom. Technol. 15 (6) (2021)