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Matthias Beichele
Publication Activity (10 Years)
Years Active: 2001-2001
Publications (10 Years): 0
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Publications
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S. Strobel
,
Anton J. Bauer
,
Matthias Beichele
,
Heiner Ryssel
Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices.
Microelectron. Reliab.
41 (7) (2001)
Matthias Beichele
,
Anton J. Bauer
,
Heiner Ryssel
O ambient.
Microelectron. Reliab.
41 (7) (2001)