M. Langenbuch

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

G. Ghidini, M. Langenbuch, R. Bottini, D. Brazzelli, Andrea Ghetti, N. Galbiati, G. Giusto, A. Garavaglia
Impact of interface and bulk trapped charges on transistor reliability. Microelectron. Reliab. 45 (5-6) (2005)
M. Langenbuch, R. Bottini, M. E. Vitali, G. Ghidini
In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability. Microelectron. Reliab. 45 (5-6) (2005)