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In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability.
M. Langenbuch
R. Bottini
M. E. Vitali
G. Ghidini
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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power plant
data processing
temperature control
neural network
case study
cost effective
key technologies
generation process
highly reliable
reliability analysis
technology adoption