J. Barbolla

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

Salvador Dueñas, Helena Castán, Héctor García, J. Barbolla, Kaupo Kukli, J. Aarik, Mikko Ritala, Markku Leskelä
Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition. Microelectron. Reliab. 45 (5-6) (2005)
Salvador Dueñas, Helena Castán, Héctor García, J. Barbolla, E. San Andrés, I. Mártil, G. González-Díaz
/Si fabricated by ECR-CVD. Microelectron. Reliab. 45 (5-6) (2005)