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J. Aarik
ORCID
Publication Activity (10 Years)
Years Active: 2005-2005
Publications (10 Years): 0
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Publications
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Salvador Dueñas
,
Helena Castán
,
Héctor García
,
J. Barbolla
,
Kaupo Kukli
,
J. Aarik
,
Mikko Ritala
,
Markku Leskelä
Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition.
Microelectron. Reliab.
45 (5-6) (2005)