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Halubai Seknar
Publication Activity (10 Years)
Years Active: 2014-2014
Publications (10 Years): 0
Top Topics
Field Effect Transistors
Electron Beam Lithography
High Density
Top Venues
NEMS
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Publications
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Nguyen Van Toan
,
Tomohiro Kubota
,
Halubai Seknar
,
Seiji Samukawa
,
Takahito Ono
Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology.
NEMS
(2014)