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G. Supriya
Publication Activity (10 Years)
Years Active: 2021-2021
Publications (10 Years): 1
Top Topics
High Density
Development Process
Information Processing
Plasma Etching
Top Venues
VDAT
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Publications
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Deepak K. Sharma
,
J. John
,
G. Supriya
,
Ashwini Jambhalikar
,
M. S. Giridhar
Process Development for Very Deep Etching of Silicon Using Two Layer Masks for Fabrication of Mechanically Decoupled MEMS Gyroscope.
VDAT
(2021)