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Emily Kinser
Publication Activity (10 Years)
Years Active: 2010-2010
Publications (10 Years): 0
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Publications
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Gregory Riou
,
Gweltaz Gaudin
,
Didier Landru
,
Catherine Tempesta
,
Ionut Radu
,
Mariam Sadaka
,
Kevin Winstel
,
Emily Kinser
,
Robert Hannon
,
Boris V. Kamenev
,
Michael Darwin
,
Robert Sachs
Pre bonding metrology solutions for 3D integration.
3DIC
(2010)
Gweltaz Gaudin
,
Gregory Riou
,
Didier Landru
,
Catherine Tempesta
,
Ionut Radu
,
Mariam Sadaka
,
Kevin Winstel
,
Emily Kinser
,
Robert Hannon
Low temperature direct wafer to wafer bonding for 3D integration: Direct bonding, surface preparation, wafer-to-wafer alignment.
3DIC
(2010)