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Donald C. Hofer
Publication Activity (10 Years)
Years Active: 1997-1997
Publications (10 Years): 0
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Publications
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Robert D. Allen
,
Gregory M. Wallraff
,
Donald C. Hofer
,
Roderick R. Kunz
Photoresists for 193-nm lithography.
IBM J. Res. Dev.
41 (1&2) (1997)