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C. Y. Su
Publication Activity (10 Years)
Years Active: 2012-2012
Publications (10 Years): 0
Top Topics
Electro Mechanical Systems
Low Density
Manufacturing Process
Plasma Etching
Top Venues
NEMS
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Publications
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Y. H. Lin
,
C. J. Weng
,
C. Y. Su
,
W. Hsu
Fabrication of deep lateral single-crystal-silicon blaze micro-grating by Inductively-Coupled-Plasma Reactive Ion Etch.
NEMS
(2012)