Azusa Yanagisawa

Publication Activity (10 Years)

Years Active: 2016-2016
Publications (10 Years): 1

Top Topics

Evolution Process

Top Venues

Publications

Naoya Watanabe, Haruo Shimamoto, Katsuya Kikuchi, Masahiro Aoyagi, Hidekazu Kikuchi, Azusa Yanagisawa, Akio Nakamura
Wet cleaning process for high-yield via-last TSV formation. 3DIC (2016)