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Anthony K. Stamper
Publication Activity (10 Years)
Years Active: 1995-1999
Publications (10 Years): 0
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Publications
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Donna R. Cote
,
Son Van Nguyen
,
Anthony K. Stamper
,
Douglas S. Armbrust
,
Dirk Tobben
,
Richard A. Conti
,
Gill Yong Lee
Plasma-assisted chemical vapor deposition of dielectric thin films for ULSI semiconductor circuits.
IBM J. Res. Dev.
43 (1) (1999)
Donna R. Cote
,
Son Van Nguyen
,
William J. Cote
,
Scott L. Pennington
,
Anthony K. Stamper
,
Dragan V. Podlesnik
Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBM.
IBM J. Res. Dev.
39 (4) (1995)