Scott L. Pennington

Publication Activity (10 Years)

Years Active: 1995-1995
Publications (10 Years): 0

Publications

Donna R. Cote, Son Van Nguyen, William J. Cote, Scott L. Pennington, Anthony K. Stamper, Dragan V. Podlesnik
Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBM. IBM J. Res. Dev. 39 (4) (1995)