Dirk Tobben

Publication Activity (10 Years)

Years Active: 1999-1999
Publications (10 Years): 0

Publications

Donna R. Cote, Son Van Nguyen, Anthony K. Stamper, Douglas S. Armbrust, Dirk Tobben, Richard A. Conti, Gill Yong Lee
Plasma-assisted chemical vapor deposition of dielectric thin films for ULSI semiconductor circuits. IBM J. Res. Dev. 43 (1) (1999)