Anatoly N. Lukin

Publication Activity (10 Years)

Years Active: 2023-2023
Publications (10 Years): 1

Top Topics

Chemical Vapor Deposition

Top Venues

Publications

Vladimir A. Terekhov, Evgeniy I. Terukov, Yurii K. Undalov, Konstantin A. Barkov, Nikolay A. Kurilo, Sergey A. Ivkov, Dmitry N. Nesterov, Pavel Seredin, Dmitry Goloshchapov, Dmitry Minakov, Elena V. Popova, Anatoly N. Lukin, Irina N. Trapeznikova
Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition. Symmetry 15 (9) (2023)