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DSA-aware multiple patterning for the manufacturing of vias: Connections to graph coloring problems, IP formulations, and numerical experiments.
Dehia Ait-Ferhat
Vincent Juliard
Gautier Stauffer
J. Andres Torres
Published in:
CoRR (2019)
Keyphrases
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real time
neural network
constraint satisfaction problems
manufacturing systems
quality control
integrated circuit
semiconductor manufacturing