Login / Signup

Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices.

R. CharavelJaume RoigS. MouhoubiP. GassotFilip BauwensPiet VanmeerbeekB. DesoetePeter MoensEddy De Backer
Published in: Microelectron. Reliab. (2010)
Keyphrases