Distributed Correction of Proximity Effect in Electron Beam Lithography on a Heterogeneous Cluster.
Noppachai AnupongpaiboolSoo-Young LeePublished in: IPDPS (2004)
Keyphrases
- electron beam lithography
- heterogeneous databases
- distributed information systems
- heterogeneous data
- heterogeneous environments
- distributed environment
- clustering algorithm
- distributed systems
- multi agent
- x ray
- loosely coupled
- distributed data
- peer to peer
- cluster analysis
- cooperative
- distributed data sources
- transparent access
- mobile agents
- electron beam
- error correction
- neural network
- data points
- heterogeneous systems
- highly distributed
- semantically heterogeneous
- web services