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Multi-Terminal PiezoMOSFET Sensor for Stress Measurements in Silicon.

Jose L. RamirezFabiano Fruett
Published in: SBCCI (2018)
Keyphrases
  • sensor networks
  • sensor measurements
  • sensor data
  • high speed
  • high density
  • time of flight
  • three dimensional
  • low cost
  • multi sensor
  • gallium arsenide