Control of a Magnet-Driven Nano Positioning Stage with Long Stroke Based on Disturbance Observer.

Le-tong Ma Xixian Mo Bo Zhang Han Ding

Published in: ICIRA (3) (2017)

Keyphrases

control system
data driven
optimal control
robotic systems
control theory
database
data sets
neural network
optical flow
control method
thin film
control problems
position information
nano scale