Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures.

Zhiyong Chen Meifeng Guo Rong Zhang Bin Zhou Qi Wei

Published in: Sensors (2018)

Keyphrases

infrared
space charge
low cost
x ray
high speed
image structure
complex structures
finite element analysis
visible spectrum
room temperature
field effect transistors
electrical properties
silicon dioxide