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Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures.

Zhiyong ChenMeifeng GuoRong ZhangBin ZhouQi Wei
Published in: Sensors (2018)
Keyphrases
  • infrared
  • space charge
  • low cost
  • x ray
  • high speed
  • image structure
  • complex structures
  • finite element analysis
  • visible spectrum
  • room temperature
  • field effect transistors
  • electrical properties
  • silicon dioxide