Reliability of Mo as Word Line Metal in 3D NAND.

Davide Tierno Kristof Croes Arjun Ajaykumar Siva Ramesh Geert Van den Bosch Maarten Rosmeulen

Published in: IRPS (2021)

Keyphrases

multi objective
co occurrence
n gram
flash memory
real time
keywords
line segments
multiobjective optimization
word recognition
differential evolution
word sense disambiguation
highly reliable
related words
information retrieval
sentence level
multiword