Automated direct patterned wafer inspection.
Babak H. KhalajHamid K. AghajanThomas KailathPublished in: WACV (1992)
Keyphrases
- defect detection
- decision making
- integrated circuit
- fully automated
- automated analysis
- three dimensional
- image sequences
- context sensitive
- automatic inspection
- database
- semiconductor manufacturing
- semi automated
- massively parallel
- case study
- decision trees
- metadata
- computer vision
- social networks
- information retrieval
- real world