Accurate Prediction and Reliable Parameter Optimization of Neural Network for Semiconductor Process Monitoring and Technology Development.
Hyeok YunChang-Hyeon AnHyundong JangKyeongrae ChoJeong-Sik LeeSeungjoon EomChoong-Ki KimMin-Soo YooHyun-Chul ChoiRock-Hyun BaekPublished in: Adv. Intell. Syst. (2023)