Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on sub-10nm Logic Technology.
Heung-Kook KoSena ParkJihyun RyuSung Ryul KimGiwon LeeDongjoon LeeSangwoo PaeEuncheol LeeYongsun JiHai JiangTaeyoung JeongTaiki UemuraDongkyun KwonHyungrok DoHyungu KahngYoon-Sang ChoJiyoon LeeSeoung Bum KimPublished in: IRPS (2020)