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Run-to-run process control for chemical mechanical polishing in semiconductor manufacturing.
Li Da
Varadarajan Ganesh Kumar
Arthur Tay
Abdullah Al Mamun
Weng Khuen Ho
Alex See
Lap Chan
Published in:
ISIC (2002)
Keyphrases
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process control
semiconductor manufacturing
discrete event simulation
control system
product quality
manufacturing process
intelligent control
feature selection
control charts
data sets
data mining
learning algorithm
image sequences
multiscale
graduate education