Two-Dimensional Principal Component Analysis-Based Convolutional Autoencoder for Wafer Map Defect Detection.
Jianbo YuJiatong LiuPublished in: IEEE Trans. Ind. Electron. (2021)
Keyphrases
- defect detection
- restricted boltzmann machine
- feature extraction
- maximum a posteriori
- automated visual inspection
- textured surfaces
- semiconductor manufacturing
- image recognition
- integrated circuit
- network architecture
- database
- massively parallel
- feedforward neural networks
- deep learning
- conditional random fields
- image sequences
- artificial intelligence
- genetic algorithm
- neural network