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Cut Mask Optimization With Wire Planning in Self-Aligned Multiple Patterning Full-Chip Routing.
Shao-Yun Fang
Kuo-Hao Wu
Published in:
IEEE Trans. Very Large Scale Integr. Syst. (2017)
Keyphrases
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optimization problems
low cost
routing protocol
heuristic search
global optimization
single chip
planning process
planning systems
high density
routing problem
routing algorithm
planning problems
ad hoc networks
neural network
optimization method
optimization algorithm
digital images
image segmentation