Fast setpoint tracking of an Atomic Force Microscope X-Y stage via optimal trajectory tracking.
Roger A. BrakerLucy Y. PaoPublished in: ACC (2017)
Keyphrases
- trajectory tracking
- closed loop
- control system
- bi directional
- dynamic model
- physical constraints
- control law
- iterative learning
- iterative learning control
- control method
- visual servoing
- real time
- particle filter
- sliding mode
- optimal control
- fuzzy logic
- neural network controller
- control scheme
- fuzzy control
- control strategy
- dynamic programming