An efficient approach to cross-fab route planning for wafer manufacturing.
Muh-Cherng WuChang-Fu ShihChen-Fu ChenPublished in: Expert Syst. Appl. (2009)
Keyphrases
- route planning
- semiconductor manufacturing
- manufacturing process
- wafer fabrication
- road network
- quality control
- integrated circuit
- process control
- optimal path
- urban areas
- free flight
- layout design
- manufacturing systems
- autonomous vehicles
- transport systems
- information services
- path planning
- dynamic environments
- data management