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PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide.

Chun-Min ZhangQing-Qing SunPeng-Fei WangDavid Wei Zhang
Published in: ASICON (2013)
Keyphrases
  • metal oxide
  • x ray
  • solid state
  • high speed
  • control system
  • database systems
  • control method
  • si sio
  • database
  • low cost
  • steady state