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PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide.
Chun-Min Zhang
Qing-Qing Sun
Peng-Fei Wang
David Wei Zhang
Published in:
ASICON (2013)
Keyphrases
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metal oxide
x ray
solid state
high speed
control system
database systems
control method
si sio
database
low cost
steady state