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A Wafer-scale Manufacturing Pathway for Fine-grained Vertical 3D-IC Technology.
Sachin Bhat
Sounak Shaun Ghosh
Sourabh Kulkarni
Mingyu Li
Csaba Andras Moritz
Published in:
ISQED (2021)
Keyphrases
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fine grained
coarse grained
massively parallel
integrated circuit
semiconductor manufacturing
access control
tightly coupled
quality control
manufacturing systems
information retrieval
knowledge base
manufacturing process
manufacturing companies
computer integrated manufacturing