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DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab.
Chunggyeom Kim
Jinhyuk Lee
Raehyun Kim
Youngbin Park
Jaewoo Kang
Published in:
Inf. Sci. (2018)
Keyphrases
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anomaly detection
automatic detection
detection accuracy
neural network
network architecture
false alarms
detection method
detection rate
information retrieval
detect anomalies
false positives
intrusion detection
object detection
target detection
neural model
image sequences
continuous wavelet transform