Statistical modeling and simulation of threshold variation under dopant fluctuations and line-edge roughness.
Yun YeFrank LiuSani R. NassifYu CaoPublished in: DAC (2008)
Keyphrases
- statistical modeling
- statistical models
- predictive modeling
- mathematical model
- nonparametric bayesian
- simulation environment
- line segments
- edge information
- false alarm probability
- data mining
- intersection points
- threshold selection
- simulation models
- simulation model
- numerical simulations
- statistical model
- machine learning