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UV Nanoimprint Lithography Using an Elementwise Embossed Stamp.

Jun-ho JeongYoung-suk SimHyonkee SohnEung-sug Lee
Published in: ICMENS (2004)
Keyphrases
  • electron beam
  • hough transform
  • electron beam lithography
  • visible spectrum
  • knowledge base
  • image sequences
  • high dimensional
  • fuzzy logic