Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation.
Shuichi NagasawaKenji HinodeTetsuro SatohMutsuo HidakaHiroyuki AkaikeAkira FujimakiNobuyuki YoshikawaKazuyoshi TakagiNaofumi TakagiPublished in: IEICE Trans. Electron. (2014)