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Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation.

Shuichi NagasawaKenji HinodeTetsuro SatohMutsuo HidakaHiroyuki AkaikeAkira FujimakiNobuyuki YoshikawaKazuyoshi TakagiNaofumi Takagi
Published in: IEICE Trans. Electron. (2014)
Keyphrases
  • process model
  • integrated circuit
  • real time
  • data mining
  • multiscale
  • computational complexity
  • high speed
  • text categorization