Modeling with hierarchical Petri net of semiconductor manufacturing system.
Huang DanYan JuanweiQiao FeiPublished in: ICARCV (2004)
Keyphrases
- manufacturing systems
- petri net
- colored petri nets
- stochastic petri net
- petri net model
- manufacturing environment
- flexible manufacturing systems
- manufacturing processes
- discrete event systems
- shop floor
- service composition
- fuzzy petri net
- holonic manufacturing systems
- web service composition
- story generation
- complex systems
- concurrent systems
- multistage
- cell formation
- manufacturing process
- control structure