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Manufacturability Enhancement With Dummy via Insertion for DSA-MP Lithography Using Multiple BCP Materials.
Yun-Jhe Jiang
Kuo-Hao Wu
Shao-Yun Fang
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2021)
Keyphrases
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artificial intelligence
database
data mining
website
bayesian networks
learning materials
multiple objects
combining multiple
electron beam