Extraction of material parameters based on inverse modeling of three-dimensional interconnect fusing structures.
Stefan HolzerRainer MinixhoferClemens HeitzingerJohannes FellnerTibor GrasserSiegfried SelberherrPublished in: Microelectron. J. (2004)
Keyphrases
- three dimensional
- physical models
- parameter estimation
- object modeling
- structural analysis
- information extraction
- d objects
- neural network
- measured data
- medical images
- maximum likelihood
- expectation maximization
- automatic extraction
- internal structures
- database
- fine tuning
- finite element
- sensitivity analysis
- model selection
- x ray
- markov random field
- least squares
- image sequences
- case study