A new approach on advanced compact plasma sensors for industrial plasma applications.

Christian Schulz Ilona Rolfes

Published in: SAS (2014)

Keyphrases

thin film
high energy
scanning electron microscope
high density
multi sensor
real time
industrial applications
sensor fusion
image processing
data fusion
neural network
database
high speed
mobile robot
artificial neural networks
feature selection
computer vision
electric field
genetic algorithm
plasma etching