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Nondestructive Inline Inspection of Through-Silicon Vias Based on X-Ray Imaging and its Uncertainty Budget.
Yasutoshi Umehara
Nobuyuki Moronuki
Published in:
Int. J. Autom. Technol. (2019)
Keyphrases
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high density
uncertain data
high speed
integrated circuit
real time
low cost
uncertain information
conditional probabilities
quality control
belief functions
probability theory
possibility theory
inherent uncertainty