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Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices.

Carlos Suarez-SegoviaCharles LerouxFlorian DomengieKaren DabertrandVincent JosephGiovanni RomanoPierre CaubetStephane ZollOlivier WeberGérard GhibaudoGilles ReimboldMichel Haond
Published in: ESSDERC (2015)
Keyphrases
  • databases
  • information retrieval
  • information systems
  • mobile devices
  • engineering design
  • database
  • artificial intelligence
  • high quality
  • computer science
  • software engineering
  • smart phones
  • diffusion model