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Design and fabrication of a high fill-factor micro-mirror array.

Sihua LiJing XuYaming Wu
Published in: NEMS (2010)
Keyphrases
  • wide range
  • design process
  • small size
  • design parameters
  • learning algorithm
  • artificial intelligence
  • user interface
  • knowledge based systems
  • user experience
  • high density
  • omni directional