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Cycle time simulation study for cluster tool operation in IC fabrication.

Amit Kumar GuptaAppa Iyer SivakumarPeter Lendermann
Published in: Int. J. Manuf. Technol. Manag. (2011)
Keyphrases
  • simulation study
  • integrated circuit
  • clustering algorithm
  • monte carlo
  • data sets
  • software tools
  • database
  • real world
  • knowledge base
  • cluster analysis
  • high density
  • analysis tool
  • electron beam