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Automatized failure analysis of tungsten coated TSVs via scanning acoustic microscopy.
E. Grünwald
Jördis Rosc
René Hammer
P. Czurratis
M. Koch
Jochen Kraft
Franz Schrank
Roland Brunner
Published in:
Microelectron. Reliab. (2016)
Keyphrases
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statistical analysis
information retrieval
image analysis
neural network
machine learning
website
data structure
data analysis
automated analysis
failure rate
failure prediction