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Lithography hotspot detection and mitigation in nanometer VLSI.
Jhih-Rong Gao
Bei Yu
Duo Ding
David Z. Pan
Published in:
ASICON (2013)
Keyphrases
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oil spill
vlsi design
high speed
electron beam
case study
multiscale
data sets
artificial neural networks
event detection
change detection
detection method
signal processing
video sequences
knowledge base
feature selection
artificial intelligence
genetic algorithm
neural network