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Approximation of the Boundary Trajectory of a Short-Focus Electron Beam using Third-Order Root-Polynomial Functions and Recurrent Matrixes Approach.
Igor Melnyk
Serhii Tuhai
Mykhailo Skrypka
Alina Pochynok
Dmytro Kovalchuk
Published in:
IDT (2023)
Keyphrases
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electron beam
x ray
integrated circuit
continuous functions
lagrange interpolation
design parameters
randomized approximation
recurrent neural networks
convex functions
trajectory data
smooth functions
real time
genetic algorithm
feed forward
approximation algorithms
semiconductor devices