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A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage.
Kazuhiro Takahashi
Ho Nam Kwon
Kunihiko Saruta
Makoto Mita
Hiroyuki Fujita
Hiroshi Toshiyoshi
Published in:
IEICE Electron. Express (2005)
Keyphrases
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three dimensional
hard disk drive
multi dimensional
solid state
wide angle
laser beam
database
fiber optic
neural network
genetic algorithm
information systems
structured light
preprocessing stage